IR Spectroscopy and Structure of RF Magnetron Sputtered a‐SiC:H Films
- 1 January 1987
- journal article
- research article
- Published by Wiley in Physica Status Solidi (b)
- Vol. 139 (1), 131-143
- https://doi.org/10.1002/pssb.2221390111
Abstract
No abstract availableKeywords
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