A force sensor based on three weakly coupled resonators with ultrahigh sensitivity
- 1 August 2015
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 232, 151-162
- https://doi.org/10.1016/j.sna.2015.05.011
Abstract
No abstract availableKeywords
This publication has 25 references indexed in Scilit:
- Investigation of mechanical properties of soft hydrogel microcapsules in relation to protein delivery using a MEMS force sensorJournal of Biomedical Materials Research Part A, 2009
- A vacuum packaged surface micromachined resonant accelerometerJournal of Microelectromechanical Systems, 2002
- A high-stiffness axial resonant probe for atomic force microscopyJournal of Microelectromechanical Systems, 2001
- Frequency-selective MEMS for miniaturized low-power communication devicesIEEE Transactions on Microwave Theory and Techniques, 1999
- Mechanical-thermal noise in micromachined acoustic and vibration sensorsIEEE Transactions on Electron Devices, 1993
- Resonant silicon sensorsJournal of Micromechanics and Microengineering, 1991
- Frequency modulation detection using high-Q cantilevers for enhanced force microscope sensitivityJournal of Applied Physics, 1991
- Thermal noise in mechanical experimentsPhysical Review D, 1990
- Atomic Force MicroscopePhysical Review Letters, 1986
- Absence of Diffusion in Certain Random LatticesPhysical Review B, 1958