Crystalline silicon cantilevers for piezoresistive detection of biomolecular forces
- 5 February 2008
- journal article
- Published by Elsevier BV in Microelectronic Engineering
- Vol. 85 (5-6), 1120-1123
- https://doi.org/10.1016/j.mee.2008.01.082
Abstract
No abstract availableKeywords
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