6-MHz 2-N/m piezoresistive atomic-force microscope cantilevers with INCISIVE tips
- 1 January 1997
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 6 (4), 294-302
- https://doi.org/10.1109/84.650125
Abstract
No abstract availableThis publication has 27 references indexed in Scilit:
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