Cantilevered bimorph-based scanner for high speed atomic force microscopy with large scanning range
- 1 May 2010
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 81 (5), 053708
- https://doi.org/10.1063/1.3428731
Abstract
A cantilevered bimorph-based resonance-mode scanner for high speed atomic force microscope(AFM) imaging is presented. The free end of the bimorph is used for mounting a sample stage and the other one of that is fixed on the top of a conventional single tube scanner. High speed scanning is realized with the bimorph-based scanner vibrating at resonant frequency driven by a sine wave voltage applied to one piezolayer of the bimorph, while slow scanning is performed by the tube scanner. The other piezolayer provides information on vibration amplitude and phase of the bimorph itself simultaneously, which is used for real-time data processing and image calibration. By adjusting the free length of the bimorph, the line scan rate can be preset ranging from several hundred hertz to several kilohertz, which would be beneficial for the observation of samples with different properties. Combined with a home-made AFM system and a commercially available data acquisition card, AFM images of various samples have been obtained, and as an example, images of the silicon grating taken at a line rate of 1.5 kHz with the scan size of 20 μ m are given. By manually moving the sample of polished Al foil surface while scanning, the capability of dynamic imaging is demonstrated.Keywords
This publication has 14 references indexed in Scilit:
- Real-time nanofabrication with high-speed atomic force microscopyNanotechnology, 2009
- High-speed atomic force microscopy for nano-visualization of dynamic biomolecular processesProgress in Surface Science, 2008
- High resonance frequency force microscope scanner using inertia balance supportApplied Physics Letters, 2008
- Design and input-shaping control of a novel scanner for high-speed atomic force microscopyMechatronics, 2008
- Components for high speed atomic force microscopyUltramicroscopy, 2006
- Active damping of the scanner for high-speed atomic force microscopyReview of Scientific Instruments, 2005
- Ultrahigh-speed scanning near-field optical microscopy capable of over 100 frames per secondApplied Physics Letters, 2003
- A high-speed atomic force microscope for studying biological macromoleculesProceedings of the National Academy of Sciences of the United States of America, 2001
- High-speed, large-scale imaging with the atomic force microscopeJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Atomic Force MicroscopePhysical Review Letters, 1986