A displacement spindle in a micro/nano level
- 8 May 2007
- journal article
- Published by IOP Publishing in Measurement Science and Technology
- Vol. 18 (6), 1710-1717
- https://doi.org/10.1088/0957-0233/18/6/s07
Abstract
No abstract availableKeywords
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- The development of a low-cost focusing probe for profile measurementMeasurement Science and Technology, 1999
- Design verifications of a linear laser encoder with high head-to-scale tolerancePublished by SPIE-Intl Soc Optical Eng ,1999