The development of a low-cost focusing probe for profile measurement
- 20 December 1999
- journal article
- design note
- Published by IOP Publishing in Measurement Science and Technology
- Vol. 11 (1), N1-N7
- https://doi.org/10.1088/0957-0233/11/1/401
Abstract
A high-precision optical probe based on the principle of focusing-range detection is developed in this research. The probe adopted for use was directly taken from the pick-up head of a CD player. Because its principle is similar to that of the autofocusing probe, the characteristics of each component of the head were investigated and its conversion into a focusing probe was attempted. The S-curve within the focusing range can be analysed, revealing the linear relationship between the normalized focus-error signal (FES) and the measured distance. The system accuracy of the probe was found. Within the measurement range of 10 µm the linearity error was about 1%, the standard deviation was about 34 nm and the frequency response was about 8 kHz. Some practical applications were carried out, namely profile measurements of a step height, a CD surface and a silicon-wafer grating. All results were highly consistent with the nominal values.Keywords
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