In Situ Reaction Mechanism Studies on Atomic Layer Deposition of Sb2Te3 and GeTe from (Et3Si)2Te and Chlorides
- 31 December 2009
- journal article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 22 (4), 1386-1391
- https://doi.org/10.1021/cm902180d
Abstract
No abstract availableThis publication has 38 references indexed in Scilit:
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