Challenges for economical growth of high quality 300 mm CZ Si crystals
- 31 July 1999
- journal article
- Published by Elsevier BV in Microelectronic Engineering
- Vol. 45 (2-3), 113-125
- https://doi.org/10.1016/s0167-9317(99)00109-4
Abstract
No abstract availableKeywords
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