Zeptogram-Scale Nanomechanical Mass Sensing
- 15 March 2006
- journal article
- Published by American Chemical Society (ACS) in Nano Letters
- Vol. 6 (4), 583-586
- https://doi.org/10.1021/nl052134m
Abstract
Very high frequency (VHF) nanoelectromechanical systems (NEMS) provide unprecedented sensitivity for inertial mass sensing. We demonstrate in situ measurements in real time with mass noise floor ∼20 zg. Our best mass resolution corresponds to ∼7 zg, equivalent to ∼30 xenon atoms or the mass of an individual 4 kDa molecule. Detailed analysis of the ultimate sensitivity of such devices based on these experimental results indicates that NEMS can ultimately provide inertial mass sensing of individual intact, electrically neutral macromolecules with single-Dalton (1 amu) resolution.Keywords
This publication has 14 references indexed in Scilit:
- Ultrasensitive nanoelectromechanical mass detectionApplied Physics Letters, 2004
- Ultimate limits to inertial mass sensing based upon nanoelectromechanical systemsJournal of Applied Physics, 2004
- Femtogram mass detection using photothermally actuated nanomechanical resonatorsApplied Physics Letters, 2003
- Noise processes in nanomechanical resonatorsJournal of Applied Physics, 2002
- Nanoelectromechanical systems face the futurePhysics World, 2001
- Monocrystalline silicon carbide nanoelectromechanical systemsApplied Physics Letters, 2001
- Fabrication and characterization of nanoresonating devices for mass detectionJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2000
- Acoustic Wave Sensors and ResponsesPublished by Elsevier BV ,1997
- Detection of mercury vapor using resonating microcantileversApplied Physics Letters, 1995
- Resonator surface contamination-a cause of frequency fluctuations?IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1989