Uniform Si nanostructures grown by oblique angle deposition with substrate swing rotation
- 6 July 2005
- journal article
- Published by IOP Publishing in Nanotechnology
- Vol. 16 (9), 1717-1723
- https://doi.org/10.1088/0957-4484/16/9/052
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
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