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Fabrication of thin films with highly porous microstructures
Home
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Fabrication of thin films with highly porous microstructures
Fabrication of thin films with highly porous microstructures
KR
K. Robbie
K. Robbie
LF
L. J. Friedrich
L. J. Friedrich
SD
S. K. Dew
S. K. Dew
TS
T. Smy
T. Smy
MB
M. J. Brett
M. J. Brett
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1 May 1995
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 13
(3)
,
1032-1035
https://doi.org/10.1116/1.579579
Abstract
No abstract available
Keywords
THIN FILMS
POROUS MICROSTRUCTURES
HIGHLY POROUS
FABRICATION OF THIN
Cited by 202 articles