Multiple quantum well 10 μm GaAs/AlxGa1−xAs infrared detector with improved responsivity

Abstract

We have achieved a high responsivity, R=1.9 A/W, 10 μm infrared detector using intersubband absorption in GaAs/Al_xGa_1−xAs quantum well superlattices. The photocurrent is produced by intersubband absorption followed by efficient photoexcited tunneling. This responsivity is nearly four times higher than our previous results and has been obtained by using thicker and higher Al_xGa_1−xAs superlattice barriers thereby reducing the dark current and allowing the detector to be operated at higher biases.