The effects of bias polarity on diamond deposition by hot-filament chemical vapor deposition
- 1 July 2005
- journal article
- Published by Canadian Science Publishing in Canadian Journal of Physics
- Vol. 83 (7), 753-759
- https://doi.org/10.1139/p05-031
Abstract
Electric voltages with both polarities were applied to silicon substrates in a hot-filament chemical vapour deposition device to study the biasing effects on deposition of diamond and carbon nanocones. It has been found that positive biasing greatly enhanced diamond nucleation density and improved diamond film quality. On the other hand, negative biasing promotes deposition of dense, well-aligned carbon nanocones. The orientation of the carbon nanocones appears to align with the direction of the electric field lines near the substrate surface.PACS Nos.: 81.15.Gh, 81.05.Uw, 81.07.–bKeywords
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