Microfabrication of cavities in polydimethylsiloxane using DRIE silicon molds
- 12 October 2007
- journal article
- research article
- Published by Royal Society of Chemistry (RSC) in Lab on a Chip
- Vol. 7 (12), 1660-1662
- https://doi.org/10.1039/b714742b
Abstract
We present a novel method to create cavities in PDMS that is simple and exhibits wide process latitude allowing control over the radius of curvature to form shallow concave pits or deep spherical cavities.Keywords
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