Etching submicrometer trenches by using the Bosch process and its application to the fabrication of antireflection structures
- 14 January 2005
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 15 (3), 580-585
- https://doi.org/10.1088/0960-1317/15/3/020
Abstract
No abstract availableKeywords
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