Molecular Layer Deposition of Alucone Polymer Films Using Trimethylaluminum and Ethylene Glycol
- 29 April 2008
- journal article
- research article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 20 (10), 3315-3326
- https://doi.org/10.1021/cm7032977
Abstract
No abstract availableKeywords
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