Polymer films formed with monolayer growth steps by molecular layer deposition
- 22 July 1991
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 59 (4), 482-484
- https://doi.org/10.1063/1.105415
Abstract
Molecular layer deposition is the process in which molecules are stacked on substrates one by one in order of preference in a vacuum. We studied the possibility using two kinds of molecules: pyromellitic dianhydride (A) and 2,4-diaminonitrobenzene or 4,4′-diaminodiphenyl ether (B). After forming a layer consisting of A (or B), we supplied molecule B (or A). The film rapidly thickened and became saturated in 10–60 s. The change in thickness induced in this step was about 5 Å, close to the size of the molecules involved. This indicates that a monomolecular layer of B (or A) grew on layer A (or B) and film growth self-terminated automatically. 15 steps of alternately supplying A and B produced a polymer film 100 Å thick.This publication has 5 references indexed in Scilit:
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