Simulations and experiments of hardening and softening resonances in a clamped–clamped beam MEMS resonator
- 31 August 2010
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 162 (2), 225-234
- https://doi.org/10.1016/j.sna.2010.04.020
Abstract
No abstract availableKeywords
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