Study of the nonlinearities in micromechanical clamped–clamped beam resonators using stroboscopic SEM
- 24 July 2008
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
- The nonlinearity cancellation phenomenon in micromechanical resonatorsJournal of Micromechanics and Microengineering, 2008
- Modelling the dynamics of a MEMS resonator: Simulations and experimentsSensors and Actuators A: Physical, 2008
- In-plane motion characterization of MEMS resonators using stroboscopic scanning electron microscopySensors and Actuators A: Physical, 2007
- Phonon-mediated characterization of microelectromechanical resonatorsApplied Physics Letters, 2006
- Phase noise in capacitively coupled micromechanical oscillatorsIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2005
- Sensitive magnetometer incorporating a high-Q nonlinear mechanical resonatorMeasurement Science and Technology, 2005
- Nonlinear Limits for Single-Crystal Silicon MicroresonatorsJournal of Microelectromechanical Systems, 2004
- Characterization of silicon micro-oscillators by scanning laser vibrometryReview of Scientific Instruments, 2002
- Capacitive microbeam resonator designJournal of Micromechanics and Microengineering, 2000
- High-Q HF microelectromechanical filtersIEEE Journal of Solid-State Circuits, 2000