Towards a button-sized 1024-site wireless cortical microstimulating array
- 22 December 2003
- conference paper
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 138-141
- https://doi.org/10.1109/cne.2003.1196776
Abstract
Design and development of a micromachined 16-site wireless addressable active stimulating microprobe, called Interestim-3, based on the University of Michigan MEMS 3-D microelectrode-array technology have been discussed. Up to 64 Interestim-3 probes can be used in parallel with only 2 connections to a mutual hybrid coil in order to achieve a 1024-site intracortical microstimulating system with no trans or subcutaneous wires. 3-D microassembly of Interestim-3 probes, which is facilitated by small number of interconnects (2/probe) that also gives way to a high yield has been shown. Interestim-3 has been fabricated in the UM 3-/spl mu/m 1M/2P BiCMOS process. It has four 60 /spl mu/m /spl times/ 3.1 mm shanks with 250/spl mu/m spacing, each having four 181/spl mu/m/sup 2/ sites. Interestim-3 circuitry has about 4200 transistors that occupy 21.2 mm/sup 2/ of 32.5 mm/sup 2/ probe back-end.Keywords
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