Adhesion and Friction Studies of Silicon and Hydrophobic and Low Friction Films and Investigation of Scale Effects
- 28 June 2004
- journal article
- Published by ASME International in Journal of Tribology
- Vol. 126 (3), 583-590
- https://doi.org/10.1115/1.1739407
Abstract
Tribological properties are crucial to the reliability of microelectromechanical systems/nanoelectromechanical systems (MEMS/NEMS). In this study, adhesion and friction measurements are made at micro and nanoscales on single-crystal silicon (commonly used in MEMS/NEMS) and hydrophobic and low friction films. These include diamondlike carbon (DLC), chemically bonded perfluoropolyether (PFPE), and self-assembled monolayer (SAM) films. Since MEMS/NEMS devices are expected to be used in various environments, measurements are made at a range of velocities, humidities, and temperatures. The relevant adhesion and friction mechanisms are discussed. It is found that solid films of DLC, PFPE, and SAM can reduce the adhesion and friction of silicon. These films can be used as anti-adhesion films for MEMS/NEMS components under different environments and operating conditions. Finally, the adhesion and friction data clearly show scale dependence. The scale effects on adhesion and friction are also discussed in the paper.Keywords
This publication has 24 references indexed in Scilit:
- Nanotribological characterization of molecularly thick lubricant films for applications to MEMS/NEMS by AFMUltramicroscopy, 2003
- Adhesion and friction studies of microelectromechanical systems/nanoelectromechanical systems materials using a novel microtriboapparatusJournal of Vacuum Science & Technology A, 2003
- Adhesion and friction forces in microelectromechanical systems: mechanisms, measurement, surface modification techniques, and adhesion theoryJournal of Adhesion Science and Technology, 2003
- Investigation of nanotribological properties of self-assembled monolayers with alkyl and biphenyl spacer chains (Invited)Ultramicroscopy, 2002
- Nanotribological properties and mechanisms of alkylthiol and biphenyl thiol self-assembled monolayers studied by AFMPhysical Review B, 2001
- Tribology of MEMSMRS Bulletin, 2001
- Tribology Issues and Opportunities in MEMSPublished by Springer Science and Business Media LLC ,1998
- Critical Review: Adhesion in surface micromechanical structuresJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1997
- Stiction in surface micromachiningJournal of Micromechanics and Microengineering, 1996
- Tribology and Mechanics of Magnetic Storage DevicesPublished by Springer Science and Business Media LLC ,1996