Movable Microstructures Manufactured by the LIGA Process as Basic Elements for Microsystems
- 1 January 1990
- book chapter
- conference paper
- Published by Springer Science and Business Media LLC
Abstract
By the LIGA process microstructures with structural heights of several hundred micrometers and dimensions down to one micrometer can be produced in submicron accuracy. Using a special sacrifical layer technique it is possible to fabricate movable as well as fixed microstructures in one process step. These microstructures are used as microsensors or microactuators. As first examples capacitive acceleration sensors as well as microgears with a shaft bearing used as microturbines have been produced by this extended LIGA technique.Keywords
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