Fabrication of a New Electrostatic Linear Actuator

Abstract

We propose a new electrostatic linear actuator with a large stroke and a new process for fabricating the actuator. A moving slider with many teeth on both sides is suspended above lower electrodes on a substrate by two bearings. A photoresist is used as a sacrificial layer. Both the slider and the bearings are fabricated by Ni electroplating. The bearings are fabricated by the self-alignment technique. Bearings with 0.6 µm clearance can be easily fabricated. All processes are performed at low temperatures up to 110°C. It is confirmed that the slider can be moved mechanically, and also can be moved by about 10 µm when a voltage pulse of 50 V is applied between the slider and the lower electrodes when the slider is upside down. However, the slider cannot move continuously because of friction. We also calculate the electrostatic force acting on one slider tooth. The simulation result shows that the reduction of the electrostatic force to the vertical direction is very important for mechanical movement of the actuator.