Wideband anti-reflective micro/nano dual-scale structures: fabrication and optical properties
- 1 January 2011
- journal article
- Published by Institution of Engineering and Technology (IET) in Micro & Nano Letters
- Vol. 6 (11), 947-950
- https://doi.org/10.1049/mnl.2011.0487
Abstract
This Letter reports the fabrication and optical characteristics of large-area wideband anti-reflective micro/nano dual-scale (MNDS) structures. Microstructures, including inverted pyramids and V-shaped grooves, with controllable geometry sizes (e.g. width, pitch and depth) are fabricated by anisotropic wet etching of silicon. Highly dense arrays of high-aspect-ratio nanostructures are then formed atop those microstructures by an improved maskless deep-reactive ion etching process. Compared with the black silicon surface made of nanostructures only, these MNDS structures further reduce the optical reflectance to less than 0.6%, and the total light absorption has almost reached 95%. More importantly, by combining the light trap of microstructures and the anti-reflectance of nanostructures, these MNDS structures can efficiently suppress the reflectance of incident light at a wideband range of wavelengths from the ultraviolet, through the solar spectrum, to the near-infrared region (i.e. from 200 to 2500 nm).Keywords
This publication has 33 references indexed in Scilit:
- The path to 25% silicon solar cell efficiency: History of silicon cell evolutionProgress In Photovoltaics, 2009
- Antireflection subwavelength structure of silicon surface formed by wet process using catalysis of single nano-sized gold particleSolar Energy Materials and Solar Cells, 2008
- Black nonreflecting silicon surfaces for solar cellsApplied Physics Letters, 2006
- Antireflective subwavelength structures on crystalline Si fabricated using directly formed anodic porous alumina masksApplied Physics Letters, 2006
- Etching submicrometer trenches by using the Bosch process and its application to the fabrication of antireflection structuresJournal of Micromechanics and Microengineering, 2005
- Optical Elements with Subwavelength Structured SurfacesOptical Review, 2003
- High performance light trapping textures for monocrystalline silicon solar cellsSolar Energy Materials and Solar Cells, 2001
- Optimised antireflection coatings for planar silicon solar cells using remote PECVD silicon nitride and porous silicon dioxideProgress In Photovoltaics, 1999
- A 19.8% efficient honeycomb multicrystalline silicon solar cell with improved light trappingIEEE Transactions on Electron Devices, 1999
- Solar cells with mesh-structured emitterProgress In Photovoltaics, 1996