SU-8 MEMS Fabry-Perot pressure sensor
- 20 July 2007
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 138 (1), 52-62
- https://doi.org/10.1016/j.sna.2007.04.047
Abstract
No abstract availableKeywords
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