High-precision absolute distance and vibration measurement with frequency scanned interferometry
- 1 July 2005
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 44 (19), 3937-3944
- https://doi.org/10.1364/ao.44.003937
Abstract
We report high-precision absolute distance and vibration measurements performed with frequency scanned interferometry using a pair of single-mode optical fibers. Absolute distance was determined by counting the interference fringes produced while scanning the laser frequency. A high-finesse Fabry–Perot interferometer was used to determine frequency changes during scanning. Two multiple-distance-measurement analysis techniques were developed to improve distance precision and to extract the amplitude and frequency of vibrations. Under laboratory conditions, measurement precision of ∼50 nm was achieved for absolute distances ranging from 0.1 to 0.7 m by use of the first multiple-distance-measurement technique. The second analysis technique has the capability to measure vibration frequencies ranging from 0.1 to 100 Hz with an amplitude as small as a few nanometers without a priori knowledge.Keywords
Other Versions
This publication has 10 references indexed in Scilit:
- Real-time nanometer-vibration measurement with a self-mixing microchip solid-state laserOptics Letters, 2002
- Absolute interferometry with a 670-nm external cavity diode laser.Applied Optics, 1999
- High-accuracy absolute distance measurement by means of wavelength scanning heterodyne interferometryMeasurement Science and Technology, 1998
- High-accuracy length metrology using multiple-stage swept-frequency interferometry with laser diodesMeasurement Science and Technology, 1998
- Absolute interferometric distance measurements applying a variable synthetic wavelengthJournal of Optics, 1998
- Frequency scanned interferometry (FSI): the basis of a survey system for ATLAS using fast automated remote interferometryNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1996
- Refractive index of air: new equations for the visible and near infraredApplied Optics, 1996
- Interferometric measurement of absolute distances of up to 40 mMeasurement, 1995
- Distance measurement by the wavelength shift of laser diode lightApplied Optics, 1986
- Dispersion of Air*Journal of the Optical Society of America, 1972