Ni based silicides for 45nm CMOS and beyond
- 15 December 2004
- journal article
- Published by Elsevier BV in Materials Science and Engineering B
- Vol. 114-115, 29-41
- https://doi.org/10.1016/j.mseb.2004.07.028
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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