Post-processing Release Of Microstructures By Electromagnetic Pulses
- 25 August 2005
- conference paper
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 214-217
- https://doi.org/10.1109/sensor.1995.717145
Abstract
Adhesion of microstructures is an important failure mechanism in surface micromachined devices. In this paper, a simple, effective post-processing method for releasing pinned microstructures is presented. The method uses the Lorentz interaction between a current and an external magnetic field to generate an upward force that frees the microstructures. The static and transient behavior of beams under the Lorentz force is examined. Critical values of current and pulse durations needed to release the microstructures are determined and verified with experimental data. Using this technique, previously pinned beams and rectangular plates have been released.Keywords
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