Fabrication of micromechanical devices from polysilicon films with smooth surfaces
- 15 November 1989
- journal article
- Published by Elsevier BV in Sensors and Actuators
- Vol. 20 (1-2), 117-122
- https://doi.org/10.1016/0250-6874(89)87109-4
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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