Fabrication of Relaxer-Based Piezoelectric Energy Harvesters Using a Sacrificial Poly-Si Seeding Layer
- 7 August 2014
- journal article
- Published by Springer Science and Business Media LLC in Journal of Electronic Materials
- Vol. 43 (11), 3898-3904
- https://doi.org/10.1007/s11664-014-3308-x
Abstract
No abstract availableKeywords
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