Study on the Microstructure and Electrical Properties of Pb(Zr0.53 Ti0.47)O3 Thin-Films
- 1 March 2010
- journal article
- Published by Trans Tech Publications, Ltd. in Materials Science Forum
- Vol. 644, 97-100
- https://doi.org/10.4028/www.scientific.net/msf.644.97
Abstract
In the present study a complete analysis of the morphological and electrical properties of PZT layers with composition 53Zr-47Ti is presented. Three different samples composed of 3, 6, and 9 PZT layers were analyzed on a substrate consisting of ZrO2-SiO2-Si structures. The PZT and ZrO2 layers were deposited via Sol-Gel, whereas the SiO2 layer, on every sample, was deposited via PECVD. SEM results showed morphology of very small granules on the 3 layered thin-film samples (12 nm), on the 6 layered thin-film samples a mixture of small and large size (100-300 nm) granule formation was observed, with the 9 layered thin-film samples exhibiting very large granule sizes (bigger than 300 nm). XRD results showed that increasing the number of deposited layers caused an incremental increase on the detected peak intensities, aided in the promotion of the perovskite phase, and diminished the presence of the pyrochlore phase. It was also observed, during electrical measurements, that increasing the number deposited layers directly increased the overall capacitance of the thin-film structure. This effect was attributed primarily to the large amount of perovskite and large size of grains presented on thick samples.Keywords
This publication has 11 references indexed in Scilit:
- In situsynchrotron diffraction investigation of morphotropicunder an applied electric fieldPhysical Review B, 2007
- Electrical Properties of Lead Zirconate Titanate Thin Films With a ZrO2Buffer Layer on an Electroless Ni-Coated Cu FoilJournal of the American Ceramic Society, 2006
- Micromachined piezoelectric diaphragms actuated by ring shaped interdigitated transducer electrodesSensors and Actuators A: Physical, 2005
- The effect of heat-treatment on the structure and chemical homogeneity of ferroelectrics PLZT thin films deposited by R.F. sputteringMaterials Chemistry and Physics, 2004
- Grain-size effect on structure and phase transformations for barium titanatePhysical Review B, 1996
- Ferroelectric Thin Films in Micro-electromechanical Systems ApplicationsMRS Bulletin, 1996
- Stability of cubic phase in nanocrystalline ZrO2Journal of Materials Research, 1994
- Sol-gel ZrO2 coatings for chemical protection of stainless steelJournal of Sol-Gel Science and Technology, 1994
- Proton and carbon-13 NMR investigations of lead zirconate titanate (Pb(Zr,Ti)O3) thin-film precursor solutionsChemistry of Materials, 1993
- Corrosion resistant sol-gel ZrO2 coatings on stainless steelJournal of Non-Crystalline Solids, 1992