A multi-component solder self-assembled micromirror
- 15 January 2003
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 103 (1-2), 187-193
- https://doi.org/10.1016/s0924-4247(02)00331-x
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
- Self-assembled 3-D silicon microscanners with self-assembled electrostatic drivesIEEE Photonics Technology Letters, 2000
- A raster-scanning full-motion video display using polysilicon micromachined mirrorsSensors and Actuators A: Physical, 2000
- Solder self-assembly for three-dimensional microelectromechanical systemsSensors and Actuators A: Physical, 1999
- Optical scanners realized by surface-micromachined vertical torsion mirrorIEEE Photonics Technology Letters, 1999
- Free-space fiber-optic switches based on MEMS vertical torsion mirrorsJournal of Lightwave Technology, 1999
- Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioningJournal of Microelectromechanical Systems, 1998
- Electrostatic micro torsion mirrors for an optical switch matrixJournal of Microelectromechanical Systems, 1996
- Demonstration of three-dimensional microstructure self-assemblyJournal of Microelectromechanical Systems, 1995
- Self-assembly of three-dimensional microstructures using rotation by surface tension forcesElectronics Letters, 1993