Silicon micromachined hollow optical waveguides for sensing applications
- 7 August 2002
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Journal of Selected Topics in Quantum Electronics
- Vol. 8 (1), 106-110
- https://doi.org/10.1109/2944.991405
Abstract
Novel micromachined optical waveguides useful for sensing applications are proposed. The waveguide is designed as hollow-core antiresonant reflecting optical waveguide (ARROW) and can be easily fabricated using standard silicon micromachining techniques. The hollow structure permits to use the core to confine simultaneously the light and the substance to be probed, leading to an increase of the interaction efficiency. Numerical simulations, performed using finite element method technique, show that with a suitable design these waveguides can be used in sensing applications, where the substances under test can be gases or liquids.Keywords
This publication has 9 references indexed in Scilit:
- Deep wet etching of fused silica glass for hollow capillary optical leaky waveguides in microfluidic devicesJournal of Micromechanics and Microengineering, 2001
- Sensitivity enhancement in evanescent optical waveguide sensorsJournal of Lightwave Technology, 2000
- Micromachining of high-contrast optical waveguides in [111] silicon wafersIEEE Photonics Technology Letters, 2000
- Experimental trial of a hollow-core waveguide used as an absorption cell for concentration measurement of NH_3 gas with a CO_2 laserOptics Letters, 1993
- Hollow metallic waveguides in silicon V-groovesIEEE Photonics Technology Letters, 1993
- Loss calculations for antiresonant waveguidesJournal of Lightwave Technology, 1993
- The model characteristics of ARROW structuresJournal of Lightwave Technology, 1992
- Remotely switched hollow-core antiresonant reflecting optical waveguideOptics Letters, 1991
- Loss reduction of an ARROW waveguide in shorter wavelength and its stack configurationJournal of Lightwave Technology, 1988