Deep wet etching of fused silica glass for hollow capillary optical leaky waveguides in microfluidic devices
- 20 April 2001
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 11 (3), 257-262
- https://doi.org/10.1088/0960-1317/11/3/315
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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