Soft lithographic fabrication of an image sensor array on a curved substrate
- 1 September 2004
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 22 (5), 2548-2551
- https://doi.org/10.1116/1.1795249
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
- A Method for Filling Complex Polymeric Microfluidic Devices and ArraysAnalytical Chemistry, 2001
- Low-Temperature Fabrication of Si Thin-Film Transistor Microstructures by Soft Lithographic Patterning on Curved and Planar SubstratesChemistry of Materials, 2000
- Technology and Applications of Amorphous SiliconPublished by Springer Science and Business Media LLC ,2000
- Soft LithographyAngewandte Chemie-International Edition, 1998
- Low temperature fabrication of amorphous silicon thin film transistors by dc reactive magnetron sputteringJournal of Vacuum Science & Technology A, 1997
- A lensless contact-type image sensor based on a CdSe photoconductive arraySensors and Actuators A: Physical, 1993
- A High Speed Contact-Type Image Sensor using Amorphous Silicon Alloy Pin DiodesMRS Proceedings, 1992
- Hydrogenated Amorphous SiliconPublished by Cambridge University Press (CUP) ,1991
- Schottky Barriers on Magnetron Sputtered a-Si:H: Depletion width Effects on Photocarrier Collection vs Bandgap and Light SoakingMRS Proceedings, 1991
- The Internal Photoemission of Electrons and Holes from Metals into Hydrogenated Amorphous SiliconMRS Proceedings, 1989