Low-Temperature Fabrication of Si Thin-Film Transistor Microstructures by Soft Lithographic Patterning on Curved and Planar Substrates
- 11 October 2000
- journal article
- research article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 12 (11), 3306-3315
- https://doi.org/10.1021/cm000480t
Abstract
No abstract availableKeywords
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