Voltage-tunable piezoelectrically-transduced single-crystal silicon micromechanical resonators
- 1 March 2004
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 111 (1), 71-78
- https://doi.org/10.1016/j.sna.2003.10.021
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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