Compatibility of zinc oxide with silicon IC processing
- 30 April 1990
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 23 (1-3), 1027-1030
- https://doi.org/10.1016/0924-4247(90)87083-u
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- The theory and application of contactless microwave lifetime measurementMaterials Science and Engineering B, 1990
- Behavior of SiNx films as masks for Zn diffusionJournal of Applied Physics, 1987
- Studies of the optimum conditions for growth of rf-sputtered ZnO filmsJournal of Applied Physics, 1975