Temperature-Induced Apparent Mass Changes Observed during Quartz Crystal Microbalance Measurements of Atomic Layer Deposition
- 23 August 2003
- journal article
- research article
- Published by American Chemical Society (ACS) in Analytical Chemistry
- Vol. 75 (19), 4975-4982
- https://doi.org/10.1021/ac030141u
Abstract
No abstract availableKeywords
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