CONSTRUCTING SEMICONDUCTOR MANUFACTURING PERFORMANCE INDEXES AND APPLYING DATA MINING FOR MANUFACTURING DATA ANALYSIS

Abstract

The indexes for semiconductor manufacturing management are complicated and interrelated. Therefore, it is hard to clarify the relationships among the indexes and to derive useful rules for production management. Existing approaches rely on following individual indexes without considering the production system as a whole. This study aims to fill the gap by reviewing the related studies on semiconductor manufacturing management and developing a complete set of performance indexes in hierarchy. In addition, we apply data mining techniques for analyzing production data collected in a semiconductor fab in Taiwan to validate this approach. The empirically derived patterns among the critical indexes were useful for supporting production management decisions. The results demonstrate the practical viability of this approach. This study concludes with results and discussion on future research.