Benchmarking semiconductor manufacturing

Abstract
We are studying the manufacturing performance of semiconductor wafer fabrication plants in theUS, Asia, and Europe. There are great similarities in production equipment, manufacturingprocesses, and products produced at semiconductor fabs around the world. However, detailedcomparisons over multi-year intervals show that important quantitative indicators of productivity,including defect density (yield), major equipment production rates, wafer throughput time, andeffective new process...