Angle-Resolved Laser-Induced Breakdown Spectrometry for Depth Profiling of Coated Materials
Open Access
- 1 July 2000
- journal article
- research article
- Published by SAGE Publications in Applied Spectroscopy
- Vol. 54 (7), 1027-1031
- https://doi.org/10.1366/0003702001950526
Abstract
The combination of angle-resolved laser ablation with the use of a collimated beam is presented as a new approach to increase the depth-resolved capabilities of laser-induced breakdown spectrometry (LIBS). The effect of beam conditioning and the reduction of the effective sampling depth due to the angular dependence of laser ablation allow ablation rates lower than 2 nm/pulse for coated materials (Sn-coated steels and Cr-coated samples). Spectral information is obtained on a single-laser-shot basis. The effect of incidence angle has been examined from differentiated emission profiles, demonstrating the beneficial effect of working at incidence different from normal. A compromise between depth resolution and emission signal must be found at large angles due to the lower irradiance resulting from the increase in beam size at the interface for large angles of incidence. A comparison of the proposed approach with the analysis provided by a commercial glow-discharge device [glow discharge optical emission spectroscopy (GD-OES)] demonstrated quite satisfactory results.Keywords
This publication has 11 references indexed in Scilit:
- Depth-resolved analysis by laser-induced breakdown spectrometry at reduced pressureSurface and Interface Analysis, 1998
- Depth Profiling of Phosphorus in Photonic-Grade Silicon Using Laser-Induced Breakdown SpectrometryApplied Spectroscopy, 1998
- Nanometric range depth-resolved analysis of coated-steels using laser-induced breakdown spectrometry with a 308 nm collimated beamJournal of Analytical Atomic Spectrometry, 1998
- Depth Profiling of Thick Layers of Graded Metal—Zirconia Ceramic Coatings Using Laser Ablation Inductively Coupled Plasma Atomic Emission SpectrometryApplied Spectroscopy, 1997
- Determination of Zr and Ti in 3-μm-Thick ZrTiN Ceramic Coating Using Laser Ablation Inductively Coupled Plasma Atomic Emission SpectrometryApplied Spectroscopy, 1997
- Capabilities of an Argon Fluoride 193 nm Excimer Laser for Laser Ablation Inductively Coupled Plasma Mass Spectometry Microanalysis of Geological MaterialsJournal of Analytical Atomic Spectrometry, 1997
- Depth-resolved Anaylsis of Multilayered Samples by Laser-induced Breakdown SpectrometryJournal of Analytical Atomic Spectrometry, 1997
- Depth Profile Studies Using Laser-Induced Plasma Emission SpectrometryApplied Spectroscopy, 1995
- Evaluation of in‐depth resolution in grimm‐type glow discharge optical emission spectrometry from differentiated depth profilesSurface and Interface Analysis, 1995
- In search of the ultimate experiment for quantitative depth profile analysis in glow discharge optical emission spectrometry. Part I: Calibration curvesSurface and Interface Analysis, 1995