Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates
Top Cited Papers
- 1 June 2002
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 413 (1-2), 186-197
- https://doi.org/10.1016/s0040-6090(02)00438-8
Abstract
No abstract availableKeywords
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