Diffusion of copper in thin TiN films
- 1 May 1982
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 91 (2), 155-162
- https://doi.org/10.1016/0040-6090(82)90429-1
Abstract
No abstract availableThis publication has 19 references indexed in Scilit:
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