A study on the penetration of platinum into silicon in Ti/Pt/Au beam lead metallization systems
- 1 January 1981
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 75 (1), 19-27
- https://doi.org/10.1016/0040-6090(81)90388-6
Abstract
No abstract availableKeywords
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