Universal tunneling behavior in technologically relevant P/N junction diodes
- 15 May 2004
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 95 (10), 5800-5812
- https://doi.org/10.1063/1.1699487
Abstract
Band-to-band tunneling was studied in ion-implanted P/N junction diodes with profiles representative of present and future silicon complementary metal–oxide–silicon (CMOS) field effect transistors. Measurements were done over a wide range of temperatures and implant parameters. Profile parameters were derived from analysis of capacitance versus voltage characteristics, and compared to secondary-ion mass spectroscopy analysis. When the tunneling current was plotted against the effective tunneling distance (tunneling distance corrected for band curvature) a quasi-universal exponential reduction of tunneling current versus, tunneling distance was found with an attenuation length of 0.38 nm, corresponding to a tunneling effective mass of 0.29 times the free electron mass and an extrapolated tunneling current at zero tunnel distance of at 300 K. These results are directly applicable for predicting drain to substrate currents in CMOS transistors on bulk silicon, and body currents in CMOS transistors in silicon-on-insulator.
Keywords
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