Mechanical characterization of micro/nanoscale structures for MEMS/NEMS applications using nanoindentation techniques
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- 1 October 2003
- journal article
- Published by Elsevier BV in Ultramicroscopy
- Vol. 97 (1-4), 481-494
- https://doi.org/10.1016/s0304-3991(03)00077-9
Abstract
No abstract availableKeywords
This publication has 14 references indexed in Scilit:
- Development of AFM-based techniques to measure mechanical properties of nanoscale structuresSensors and Actuators A: Physical, 2002
- Micro/nanomechanical and tribological characterization of ultrathin amorphous carbon coatingsJournal of Materials Research, 1999
- Micro/nanomechanical characterization of ceramic films for microdevicesThin Solid Films, 1999
- Fatigue Properties for Micro-Sized Ni-P Amorphous Alloy SpecimensMRS Proceedings, 1999
- Mechanical Property Measurement of Electroplated Gold Microstructure Using Resonance MethodMRS Proceedings, 1999
- Micro/nanotribological studies of polysilicon and SiC films for MEMS applicationsWear, 1998
- Nanoindentation and picoindentation measurements using a capacitive transducer system in atomic force microscopyPhilosophical Magazine A, 1996
- Microtribological studies of doped single-crystal silicon and polysilicon films for MEMS devicesSensors and Actuators A: Physical, 1996
- Fracture toughness and crack morphology in indentation fracture of brittle materialsJournal of Materials Science, 1996
- Elastic/Plastic Indentation Damage in Ceramics: The Median/Radial Crack SystemJournal of the American Ceramic Society, 1980