EPR and optical studies on polycrystalline diamond films grown by chemical vapor deposition and annealed between 1100 and 1900 K
- 15 January 1998
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 57 (4), 2302-2309
- https://doi.org/10.1103/physrevb.57.2302
Abstract
The affect of annealing polycrystalline chemical vapor deposition (CVD) diamond in vacuo up to 1900 K has been studied using electron paramagnetic resonance (EPR) and infrared absorption. The concentration of the EPR centers at and the infrared absorption in the CH region are insensitive to annealing below 1500 K. On annealing at 1700 K it was found that (a) some of the hydrogen on internal grain boundaries or in intergranular material became mobile (in samples with strong CH absorption there was a decrease in the peak at 2920 cm and an increase in the peak at 2820 cm but was not lost from the sample and (b) the intensity of the EPR absorption at decreased. More than one defect contributes to the EPR absorption at in the samples studied. Annealing at 1900 K (no graphitization of the external surfaces occurred), in all except one case, severely degraded the optical properties of the samples and a different EPR defect at was created. Infrared measurements showed that hydrogen is lost from most CVD diamond samples when annealed to 1900 K for 4 h.
Keywords
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