Effect of nitrogen on the growth of diamond films
- 25 July 1994
- journal article
- letter
- Published by AIP Publishing in Applied Physics Letters
- Vol. 65 (4), 403-405
- https://doi.org/10.1063/1.112315
Abstract
The incorporation of nitrogen in diamond films and its effect on film growth were investigated. The nitrogen doping efficiency was found to be very low, consistent with a model of film growth involving simultaneous deposition and etching, which predicts a doping efficiency of 10−4. The growth habit was found to change from (111) to (100) with increase of nitrogen in the gas phase from N/C = 0.1% to 10%. The growth rate of the diamond films increases, and the diamond Raman peak sharpens with the amount of nitrogen, a result consistent with the model on defect‐induced stabilization of diamond.Keywords
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